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When a Texas semiconductor manufacturer needed reliable level detection of their scrubber sumps, they turned to Flowline. Chemicals like silane, phosphine and arsine are used in wafer fabrication, and the resulting hazardous vapor stream must be scrubbed to EPA requirements prior to release. The abatement process is constant during manufacturing and managing the scrubber sump levels is critical. The integrator needed a reliable, corrosion resistant level switch that’s unaffected by residual particulates or hazardous chemicals. For this reason, Flowline suggested our AU18 ultrasonic switch that’s entirely constructed of corrosion resistant PP with an integral junction box and 2″ process mount. The ultrasonic switch provides reliable level detection to the PLC, which monitors and refills the sump. Flowline is reliable level measurement. |




