Semiconductor wafer process machines utilize highly corrosive media such as TMAH that must be collected and transferred into waste treatment. Traditional contact level control devices generally fail due to corrosion attack. Flowline ultrasonic
level switches are the non-contact solution for sump level detection
and control. Each of the three integral relays can be
configured as a single point alarm, two point latched automatic
fill or empty, or two-point out of bounds alarm.